Bonding wire for semiconductor devices
AssigneesNippon Micrometal Corporation, Nippon Steel Chemical & Material Co., Ltd.
InventorsDaizo Oda, Takumi Ohkabe, Teruo Haibara, Takashi Yamada, Tetsuya Oyamada, Tomohiro Uno
Life of this patent
Estimating the term…
Abstract
Bonding wire for semiconductor devices contains one or more of Be, B, P, Ca, Y, La, and Ce in a total of 0.031 at % to obtain a 0.180 at %, further contains one or more of In, Ga, and Cd in a total of 0.05 at % to 5.00 at %, and has a balance of Ag and unavoidable impurities. Due to this, it is possible to obtain a bonding wire for semiconductor devices sufficiently forming an intermetallic compound layer at a ball bond interface to secure the bond strength of the ball bond, not causing neck damage even in a low loop, having a good leaning characteristic, and having a good FAB shape.
Claims7
Bonding wire for semiconductor devices consisting of:
- (C-1) P of 0.060 at % to 0.180 at %, or (C-2) P and one or more of Be, B, Ca, Y, La, and Ce in a total of 0.060 at % to 0.180 at %;
- one or more of In, Ga, and Cd in a total of 0.05 at % to 5.00 at %;
- one or more of Ni, Cu, Rh, Pd, Pt, and Au in a total of 0.01 at % to 5.00 at %;
- and
- a balance of Ag and unavoidable impurities.
Bonding wire for semiconductor devices consisting of:
- (C-3) P of 0.031 at % to less than 0.060 at % or (C-4) P of 0.031 at % to less than 0.060 at % and one or more of Be, B, Ca, Y, La, and Ce in a total of 0.031 at % to 0.180 at %;
- one or more of In, Ga, and Cd in a total of 0.05 at % to 5.00 at %;
- one or more of Ni, Cu, Rh, Pd, Pt, and Au in a total of 0.01 at % to 5.00 at %;
- and
- a balance of Ag and unavoidable impurities,
- wherein when defining a ratio of the total of a number of atoms of In, Ga, and Cd with respect to a total number of atoms of metal elements as a second element atomic ratio, the bonding wire satisfies one or both of
- (A) the second element atomic ratio at a region from a wire surface to 1 nm from the wire surface in a depth direction is 1.1 times or more the second element atomic ratio at a region from 1 nm from the wire surface to 10 nm from the wire surface in the depth direction, and
- (B) the second element atomic ratio at a region from the wire surface to 10 nm from the wire surface in the depth direction is 2 times or more the second element atomic ratio at a region from 20 nm from the wire surface to 30 nm from the wire surface in the depth direction.
Dependencies are inferred from the claim text.