Back to results
US 12,412,763 B2Granted
Wafer boat
AssigneeKYOCERA Corporation
InventorShoichi Ota
Life of this patent
Estimating the term…
Abstract
A wafer boat according to the present disclosure includes a plurality of support columns, each having a pillar shape and comprising a plurality of grooves configured to have a wafer placed thereon, and support plates configured to support both end portions of the plurality of support columns, respectively. Each of the plurality of support columns are formed of a ceramic containing aluminum oxide or silicon carbide as a main constituent, and an outer side surface of the plurality of support columns is a ground surface and/or a polished surface.
Claims11
A wafer boat comprising:
- a plurality of support columns, each having a pillar shape and comprising a plurality of grooves configured to have a wafer placed thereon;
- and
- support plates configured to support both end portions of the plurality of support columns respectively, wherein
- each of the plurality of support columns are formed of a ceramic comprising aluminum oxide or silicon carbide as a main constituent, and
- an outer side surface of the plurality of support columns is a ground surface and/or a polished surface, wherein
- each of both end portions of the plurality of support columns comprises an engaging portion having a flat plate shape and comprising a through hole in a thickness direction,
- the support plates are provided with a female screw at an axial center of each through hole, and
- a male screw is engaged with the female screw through the through hole.
5 more elements
Dependencies are inferred from the claim text.