Large area synthesis of cubic phase gallium nitride on silicon
AssigneeThe Board of Trustees of the University of Illinois
InventorsCan Bayram, Muhammad Ali Johar, Jae Kwon Lee
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AssigneeThe Board of Trustees of the University of Illinois
InventorsCan Bayram, Muhammad Ali Johar, Jae Kwon Lee
Estimating the term…
A wafer includes a buried substrate; a first layer of silicon (100) disposed on the buried substrate that includes silicon sidewalls (111) at an angle to the buried substrate and that form a bottom of each of multiple U-shaped grooves; a second layer of patterned oxide disposed on the silicon (100) that provides vertical sidewalls of each U-shaped groove formed within the first and second layers; a third layer of a buffer covering the first layer and partially covering the second layer partway up the vertical sidewalls; and multiple gallium nitride (GaN)-based structures disposed within the multiple U-shaped grooves, the multiple GaN-based structures each including cubic gallium nitride (c-GaN) formed at merged growth fronts of hexagonal gallium nitride (h-GaN) that extend from the silicon sidewalls (111).
A wafer comprising:
A wafer comprising:
Dependencies are inferred from the claim text.