Rotary magnetron sputtering with individually adjustable magnetic field

A magnetron assembly configured within a hollow cathode target for magnetron sputtering comprising:

• a plurality of magnets attached to a plurality of yokes;
• a plurality of driving modules, the driving modules each comprising an actuating mechanism operatively coupled to at least one corresponding yoke of the plurality of yokes;
• and
• a plurality of slave controllers connected to a master controller;
• and
• wherein the plurality of slave controllers and the master controller are located within the magnetron assembly,
• wherein each of the slave controllers is in operative communication with a corresponding one of the plurality of driving modules,
• wherein each of the plurality of driving modules is adapted to displace the at least one corresponding yoke of the plurality of yokes individually,
• wherein each of the driving modules is adapted to displace the at least one corresponding yoke in accordance with signals sent from the master controller and received through the corresponding slave controller, and to send a confirmation signal to the master controller after the corresponding yoke has been displaced,
• wherein the magnetron assembly is configured to be contained within a rotary cathode assembly, which comprises at least one optical fiber coupled to a first end of the rotary cathode assembly, wherein the at least one optical fiber includes a static part and a rotating part coupled through a lens, wherein the master controller is configured to send the signals to the magnetron assembly and receive the confirmation signal from the magnetron assembly via the at least one optical fiber, and
• a protective tube contained within the rotary cathode assembly, wherein the protective tube contains the plurality of magnets, the plurality of driving modules, the plurality of actuating mechanisms, an elongated support bar, the plurality of slave controllers, the master controller, at least one rechargeable battery and at least one cooling fluid pipe.