Adjustable support for arc chamber of ion source
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsPo-Tang Tseng, Ching-Heng Yen, Tai-Kun Kao, Sheng-Tai Peng
Life of this patent
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Abstract
An assembly present in an ion source for supporting an arc chamber upon a base plate includes a first arc support plate, a first screw, and a second screw. The first screw passes through a smooth through-hole in an arm of the first arc support plate and extends into a bore in the base plate. The second (or adjustable) screw passes through a threaded through-hole in an arm of the first arc support plate and engages an upper surface of the base plate itself, and can be used to change the altitude and angle of the first arc support plate relative to the base plate. This adjustment ability improves the beam quality of the ion source.
Claims20
An ion source for an ion implanter, comprising:
- an arc chamber supported by an arc support plate;
- wherein the arc support plate comprises a front face and at least one arm, the at least one arm extending beyond the front face and containing a plurality of through-holes that extend entirely through the at least one arm.
An assembly for supporting an arc chamber, comprising:
- a first arc support plate, a base plate, and a first screw;
- wherein the first arc support plate comprises a first arm, the first arm containing a first through-hole;
- wherein the base plate comprises a bore extending into an upper surface;
- and
- wherein the first screw can adjust an angle between the first arc support plate and the base plate.
An assembly for supporting an arc chamber, comprising:
- a first arc support plate, a base plate, and a first screw;
- wherein the first arc support plate comprises at least one arm, the at least one arm containing a first through-hole and a second through-hole;
- wherein the base plate comprises a bore extending into an upper surface and an alignment pin;
- wherein the first screw passes through the first through-hole and into the bore of the base plate;
- and
- wherein the alignment pin engages the second through-hole.
Dependencies are inferred from the claim text.