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US 12,411,426 B2Granted
Substrate holding board, manufacturing method of device, and exposure device
AssigneeCanon Kabushiki Kaisha
InventorsShinji Fukui, Toshinao Tatsuno, Hideo Akiba, Keiji Hirabayashi
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Abstract
A substrate holding board includes a first layer and a second layer forming an interfacial surface with the first layer. The first layer and the second layer contain diamond-like carbon. A refractive index of the first layer in a wavelength is higher than a refractive index of the second layer in the wavelength. A distance from the second layer to a topmost surface of the substrate holding board is smaller than a thickness of the first layer.
Claims20
A substrate holding board comprising:
- a base portion;
- a first layer forming an interfacial surface with the base portion or with a protruding portion on the base portion;
- and
- a second layer forming an interfacial surface with the first layer,
- wherein the first layer and the second layer contain diamond-like carbon,
- wherein a refractive index of the first layer in a wavelength is higher than a refractive index of the second layer in the wavelength, and
- wherein the second layer is formed on the first layer,
- wherein a hydrogen content of the first layer is smaller than a hydrogen content of the second layer.
5 more elements
A substrate holding board comprising:
- a base;
- a first layer formed directly on the base portion or directly on a protruding portion on the base portion;
- and
- a second layer formed directly on the first layer,
- wherein the first layer and the second layer contain diamond-like carbon including hydrogen or nitrogen,
- wherein a hydrogen content of the first layer is smaller than a hydrogen content of the second layer, or a nitrogen content of the first layer is smaller than a nitrogen content of the second layer.
3 more elements
Dependencies are inferred from the claim text.