Composite substrate for electro-optical element
AssigneeNGK Insulators, Ltd.
InventorsRyosuke Hattori, Tomoyoshi Tai, Keiichiro Asai, Jungo Kondo
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AssigneeNGK Insulators, Ltd.
InventorsRyosuke Hattori, Tomoyoshi Tai, Keiichiro Asai, Jungo Kondo
Estimating the term…
There is provided a composite substrate in which peeling is significantly suppressed, light propagation loss is small when used as an electro-optical element, and high-speed and low-voltage drive is possible, and which can achieve an extremely thin electro-optical element capable of maintaining excellent reliability even under a severe high-temperature environment. A composite substrate for an electro-optical element according to an embodiment of the present invention includes: an electro-optical crystal substrate having an electro-optical effect; a first high dielectric layer; a second high dielectric layer; and a support substrate in the stated order. The first high dielectric layer and the second high dielectric layer are directly joined to each other, and an amorphous layer is formed at a joining interface between the first high dielectric layer and the second high dielectric layer.
A composite substrate for an electro-optical element, comprising:
A composite substrate for an electro-optical element, comprising:
Dependencies are inferred from the claim text.