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US 12,411,337 B2Granted
System and method for MEMS devices
AssigneeTexas Instruments Incorporated
InventorsToby Linder, John Hamlin, Kelly J. Taylor
Life of this patent
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Abstract
Systems and methods for MEMS devices are disclosed. A microelectromechanical system (MEMS) device includes a substrate, and a MEMS structure supported by the substrate. The MEMS structure includes a first layer of a first material comprising a titanium aluminum alloy. The MEMS structure further includes an aluminum layer on the first layer.
Claims20
A microelectromechanical system (MEMS) device comprising:
- a substrate;
- a post supported by the substrate;
- and
- a MEMS structure supported by the post, the MEMS structure comprising:
- a first layer of a first material comprising a titanium aluminum alloy;
- and
- an aluminum layer over the first layer, the aluminum layer over the post.
4 more elements
A microelectromechanical (MEMS) device comprising:
- a substrate;
- a hinge;
- a pillar between the hinge and the substrate;
- and
- a micromirror coupled to the hinge via a post, the micromirror comprising:
- a first layer of metal, the first layer comprising aluminum;
- and
- a second layer of metal between the first layer and the hinge, the second layer comprising a titanium aluminum alloy.
5 more elements
A microelectromechanical system (MEMS) device comprising:
- a substrate;
- a post supported by the substrate;
- and
- a MEMS structure supported by the post, the MEMS structure comprising:
- a first layer of a first material comprising a titanium aluminum alloy, the first layer forming at least a portion of the post;
- and
- a second layer over the first layer, the second layer being an aluminum layer.
4 more elements
Dependencies are inferred from the claim text.