Multi-order optical modulator and modulation method for on-chip optical matrix calculation

A multi-order optical modulator for on-chip optical matrix calculation, comprising:

• input waveguides, a 2×2 optical beam splitter, initial phase modulators, multi-order phase modulators, a 2×2 optical beam combiner, and an output waveguide;
• wherein the input waveguides comprise a first input waveguide and a second input waveguide, and the first input waveguide and the second input waveguide are respectively connected to two input ports of the 2×2 optical beam splitter for being connected to optical fibers or input waveguides of other on-chip structures;
• the initial phase modulators comprise a first initial phase modulator and a second initial phase modulator which are respectively connected to two output ports of the 2×2 optical beam splitter;
• the multi-order phase modulators comprise a first multi-order phase modulator and a second multi-order phase modulator, and the first multi-order phase modulator and the second multi-order phase modulator are respectively connected to the first initial phase modulator and the second initial phase modulator;
• two input ends of the 2×2 optical beam combiner are respectively connected to the first multi-order phase modulator and the second multi-order phase modulator, and the 2×2 optical beam combiner is connected to the output waveguide;
• each of the initial phase modulators is formed by covering a silicon waveguide with a chalcogenide thin film of a fixed length, an upper layer of the chalcogenide thin film is covered with an aluminium oxide protective layer and a conductive thin film layer, and two sides of the chalcogenide thin film are covered with metal electrodes;
• and
• a micro-heater is formed by the metal electrodes and the conductive thin film layer, and an electrical pulse is applied to perform crystallization and de-crystallization operation on the chalcogenide thin film.