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US 12,411,084 B2Granted
Transmission type optical measurement device having improved measurement accuracy
AssigneeUshio Denki Kabushiki Kaisha
InventorToshikazu Nagashima
Life of this patent
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Abstract
A conveyance device supports and conveys an object. The conveyance device has a support portion in which an opening narrower than the object is provided at a position where the object is supported. A lighting device irradiates a first surface of the object with measurement light having a wavelength changing over time through the opening of the support portion. A light receiving device detects object light that is diffusely transmitted light emitted from a second surface of the object.
Claims6
An optical measurement device comprising:
- a conveyance device configured to support and convey an object and including a support portion configured to support the object;
- a lighting device configured to irradiate a first surface of the object with measurement light having a wavelength changing over time through the support portion, wherein the measurement light is coherent laser light;
- and
- a light receiving device configured to detect diffusely transmitted light emitted from a second surface of the object, wherein
- the support portion has an opening narrower than the object,
- the lighting device irradiates the first surface of the object with the measurement light through the opening of the support portion,
- a negative pressure is maintained inside the conveyance device, and
- the opening serves as an intake port such that the object is sucked to the conveyance device.
5 more elements
An optical measurement device comprising:
- a conveyance device configured to support and convey an object, and including a support portion configured to support the object;
- a lighting device configured to irradiate a first surface of the object with measurement light having a wavelength changing over time, wherein the measurement light is coherent laser light;
- and
- a light receiving device configured to detect diffusely transmitted light emitted from a second surface of the object,
- wherein the light receiving device includes:
- a light sensor having a size smaller than the object;
- and
- a condensing optical system including a lens having a size larger than the object,
- and
- the support portion has an opening narrower than the object, the lighting device irradiates the first surface of the object with the measurement light through the opening of the support portion, a negative pressure is maintained inside the conveyance device, and the opening serves as an intake port such that the object is sucked to the conveyance device.
7 more elements
Dependencies are inferred from the claim text.