Turbomolecular vacuum pump and associated method
AssigneePfeiffer Vacuum GmbH
InventorsPierre-Emmanuel Cavarec, Cécile Chavanne, Nicolas Varennes, Alysson Bruno Barbosa Moreira
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AssigneePfeiffer Vacuum GmbH
InventorsPierre-Emmanuel Cavarec, Cécile Chavanne, Nicolas Varennes, Alysson Bruno Barbosa Moreira
Estimating the term…
A turbomolecular vacuum pump includes a stator, a rotor to rotate inside the stator, and a motor to drive the rotation of the rotor. The turbomolecular vacuum pump further includes a temperature sensor to measure the temperature of the rotor and a creep maintenance meter to determine an incremental change in the creep of the rotor over a predetermined duration from the temperature of the rotor, as measured by the temperature sensor, from the rotational speed of the rotor, from the value of the creep of the rotor, and from the look-up table, to increment the rotor-creep value by the determined creep increment, and to determine, based on the incremented creep value, a data item indicative of the remaining time for which the rotor can run before needing preventive maintenance for creep.
A turbomolecular vacuum pump comprising:
Dependencies are inferred from the claim text.