Bidirectional indexing apparatus
AssigneeLam Research Corporation
InventorsAdriana Vintila, Matthew Scott Mudrow
Life of this patent
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Abstract
In an example embodiment, a bidirectional indexing apparatus includes a plurality of bidirectional indexing heads that can operate independently of each other or in concert to adjust a gap between a substrate and a pedestal in a substrate processing chamber. In some embodiments, a bidirectional indexing head comprises a base; a rotatable plate rotatable relative to the base, the rotatable plate including a plurality of profiled pockets each defining a camming surface therein; and a plurality of camming pins, each disposed to act on the camming surface of a respective profiled pocket to move the rotatable plate in a first or second rotatable direction when actuated.
Claims14
A bidirectional indexing head comprising;
- a base;
- a rotatable plate rotatable relative to the base, the rotatable plate including a plurality of profiled pockets each defining a camming surface therein, wherein each profiled pocket defines a camming surface having a plane of symmetry;
- and
- a plurality of camming pins, each disposed to act on the camming surface of a respective profiled pocket to move the rotatable plate in wherein each camming pin is movable in an axial direction, aligned with a lifting direction.
A bidirectional indexing apparatus including at least one indexing head, the at least one indexing head comprising;
- a base;
- a rotatable plate rotatable relative to the base, the rotatable plate including a plurality of profiled pockets each defining a camming surface therein, wherein each profiled pocket defines a camming surface having a plane of symmetry;
- and
- a plurality of camming pins, each disposed to act on the camming surface of a respective profiled pocket to move the rotatable plate in wherein each camming pin is movable in an axial direction, aligned with a lifting direction.
Dependencies are inferred from the claim text.