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US 12,408,503 B2Granted
Layered structure with deformation control layer
AssigneeIQE plc
InventorsAndrew Johnson, Andrew Joel
Life of this patent
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Abstract
A layered structure comprising a substrate having a first deformation. Also one or more device layers forming a device and having a second deformation. A deformation control layer which is pseudomorphic with respect to the substrate and having a third deformation. The deformation control layer is selected such that a sum of the first, second and third deformations matches a target level of deformation. Advantageously the layered structure has a controlled, known deformation which can be compressive, tensile or zero.
Claims20
A layered structure comprising:
- a substrate having a first deformation, wherein the substrate comprises germanium;
- one or more device layers forming an entire device, the entire device having a second deformation;
- and
- a deformation control layer which is pseudomorphic with respect to the substrate, the deformation control layer having a third deformation,
- wherein the deformation control layer is selected such that a sum of the first deformation, the second deformation, and the third deformation matches a target level of deformation,
- wherein the target level of deformation comprises a net compressive deformation or a net tensile deformation,
- wherein the deformation control layer is positioned between the substrate and the entire device, and
- wherein the entire device is directly on an upper surface of the deformation control layer.
5 more elements
A method of fabricating a layered structure, the method comprising:
- growing a pseudomorphic deformation control layer on a substrate, the pseudomorphic deformation control layer having a third deformation and the substrate having a first deformation, wherein the substrate comprises germanium;
- and
- growing one or more device layers directly on the pseudomorphic deformation control layer to form an entire device, the entire device having an aggregate second deformation,
- wherein the pseudomorphic deformation control layer is selected such that a sum of the first deformation, the aggregate second deformation, and the third deformation matches a target level of deformation,
- wherein the target level of deformation comprises a net compressive deformation or a net tensile deformation,
- wherein the pseudomorphic deformation control layer is positioned between the substrate and the entire device, and
- wherein the entire device is directly on an upper surface of the pseudomorphic deformation control layer.
4 more elements
Dependencies are inferred from the claim text.