Device and method for generating a plasma jet

A method for generating a plasma jet, wherein the method comprises the steps of:

• flowing a first ignitable gas through an inner channel towards an exit opening of the inner channel, and generating a plasma from the first ignitable gas flowing in the inner channel by a high voltage electrode arranged in the inner channel;
• flowing a monomer precursor through a middle channel towards an exit opening of the middle channel, wherein the middle channel surrounds the inner channel, and wherein the middle channel is electrically insulated from the inner channel;
• and
• flowing a second ignitable gas through an outer channel towards an exit opening of the outer channel, wherein the outer channel surrounds the middle channel, wherein the outer channel is electrically insulated from the middle channel;
• mixing the plasma of the first ignitable gas, the monomer precursor and the second ignitable gas in a mixing volume of a nozzle cap located after the exit openings of the inner channel, the middle channel and the outer channel;
• and
• ejecting the mixture of the plasma of the first ignitable gas, the monomer precursor and the second ignitable gas in the mixing volume out of an exit opening of the nozzle cap located after the mixing volume, wherein the exit opening of the nozzle cap is smaller than the exit opening of the outer channel.