Acoustic wave device
AssigneeMurata Manufacturing Co., Ltd.
InventorAkira Noguchi
Life of this patent
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Abstract
An acoustic wave device includes a piezoelectric substrate, a first interdigital transducer electrode on the piezoelectric substrate, and a first reflector and a second reflector. The first interdigital transducer electrode, the first reflector, and the second reflector each include a plurality of electrode fingers. At least one of the first interdigital transducer electrode, the first reflector, and the second reflector has a nonuniform duty ratio area where three successive electrode fingers in an acoustic wave propagation direction all have different duty ratios.
Claims18
An acoustic wave device comprising:
- a piezoelectric substrate;
- an interdigital transducer electrode on the piezoelectric substrate;
- and
- a first reflector and a second reflector on the piezoelectric substrate and on both sides of the interdigital transducer electrode in an acoustic wave propagation direction;
- wherein
- the interdigital transducer electrode, the first reflector, and the second reflector each include a plurality of electrode fingers;
- at least one of the interdigital transducer electrode, the first reflector, and the second reflector has a nonuniform duty ratio area where three successive electrode fingers in the acoustic wave propagation direction all have different duty ratios;
- and
- a standard deviation in a distribution of all duty ratios in the interdigital transducer electrode, the first reflector, and the second reflector is greater than or equal to about 0.015.
An acoustic wave device comprising:
- a piezoelectric substrate;
- an interdigital transducer electrode on the piezoelectric substrate;
- and
- a first reflector and a second reflector on the piezoelectric substrate and on both sides of the interdigital transducer electrode in an acoustic wave propagation direction;
- wherein
- the interdigital transducer electrode, the first reflector, and the second reflector each include a plurality of electrode fingers;
- when a value obtained by dividing a width of any of the electrode fingers by an average width of all the electrode fingers of the interdigital transducer electrode, the first reflector, and the second reflector is defined as an average width ratio of the electrode finger, at least one of the interdigital transducer electrode, the first reflector, and the second reflector has a nonuniform average width ratio area where three successive electrode fingers in the acoustic wave propagation direction all have different average width ratios;
- and
- a standard deviation in a distribution of widths of all the electrode fingers of the interdigital transducer electrode, the first reflector, and the second reflector is greater than or equal to about 0.015.
An acoustic wave device comprising:
- a piezoelectric substrate;
- an interdigital transducer electrode on the piezoelectric substrate;
- and
- a first reflector and a second reflector on the piezoelectric substrate and on both sides of the interdigital transducer electrode in an acoustic wave propagation direction;
- wherein
- the interdigital transducer electrode, the first reflector, and the second reflector each include a plurality of electrode fingers;
- when a value obtained by dividing a width of any of the electrode fingers by an average width of all the electrode fingers of the interdigital transducer electrode, the first reflector, and the second reflector is defined as an average width ratio of the electrode finger, at least one of the interdigital transducer electrode, the first reflector, and the second reflector has a nonuniform average width ratio area where three successive electrode fingers in the acoustic wave propagation direction all have different average width ratios;
- the interdigital transducer electrode includes a first region including the electrode finger at one end of the interdigital transducer electrode in the acoustic wave propagation direction and a second region including the electrode finger at the other end of the interdigital transducer electrode in the acoustic wave propagation direction;
- and
- the nonuniform average width ratio area is located outside a boundary between the first region and a region adjacent to the first region and outside a boundary between the second region and a region adjacent to the second region.
An acoustic wave device comprising:
- a piezoelectric substrate;
- an interdigital transducer electrode on the piezoelectric substrate;
- and
- a first reflector and a second reflector on the piezoelectric substrate and on both sides of the interdigital transducer electrode in an acoustic wave propagation direction;
- wherein
- the interdigital transducer electrode, the first reflector, and the second reflector each include a plurality of electrode fingers;
- at least one of the interdigital transducer electrode, the first reflector, and the second reflector has a nonuniform duty ratio area where three successive electrode fingers in the acoustic wave propagation direction all have different duty ratios;
- the interdigital transducer electrode includes a first region including the electrode finger at one end of the interdigital transducer electrode in the acoustic wave propagation direction, a second region including the electrode finger at the other end of the interdigital transducer electrode in the acoustic wave propagation direction, and a third region adjacent to both the first region and the second region;
- and
- the nonuniform duty ratio area is located outside a boundary between the first region and the third region and outside a boundary between the second region and the third region.
Dependencies are inferred from the claim text.