Rate enhanced pulsed DC sputtering system
AssigneeAdvanced Energy Industries, Inc.
InventorDouglas Pelleymounter
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AssigneeAdvanced Energy Industries, Inc.
InventorDouglas Pelleymounter
Estimating the term…
A sputtering system and method are disclosed. The system includes first power source coupled between a first and second power leads, and the first power source provides a first voltage that alternates between positive and negative during each of multiple cycles. The system also includes a second power source coupled between the second power lead and a third power lead, and the second power source provides a second voltage that alternates between positive and negative during each of the multiple cycles. A controller of the system controls the first power source and the second power source to phase-synchronize the first voltage with the second voltage, so both, the first voltage and the second voltage, are simultaneously negative during a portion of each cycle and simultaneously positive during another portion of each cycle.
A pulsed power system, comprising:
A non-transitory memory including non-transitory instructions that are,
A method of pulsed direct current sputtering, comprising:
Dependencies are inferred from the claim text.