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US 12,406,831 B2Granted
Plasma resistant member, plasma treatment device component, and plasma treatment device
AssigneeKYOCERA Corporation
InventorsMamoru Yamashiro, Yoshinori Kubo, Keiji Yukihiro
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Abstract
The present disclosure relates to a plasma resistant member in which a surface exposed to plasma is formed from a single crystal yttrium⋅aluminum⋅garnet (YAG) having a {100} plane, and a plasma treatment device component and a plasma treatment device using the plasma resistant member. When there are a plurality of surfaces exposed to plasma, at least a surface required to have the highest plasma resistance is formed from the single crystal YAG having a {100} plane.
Claims18
A plasma resistant member comprising:
- a surface configured for exposure to plasma,
- the surface formed from a single crystal yttrium aluminum garnet (YAG) having a {100} plane.
A plasma resistant member comprising:
- a plurality of surfaces for exposure to plasma,
- at least one surface of the plurality of surfaces having a highest plasma resistance, the at least one surface formed from a single crystal yttrium aluminum garnet (YAG) having a {100} plane.
Dependencies are inferred from the claim text.