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US 12,406,827 B2Granted
Microscopic specimen and analysis method thereof using microscope
AssigneeSogang University Research & Business Development Foundation
InventorHyobin Yoo
Life of this patent
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Abstract
Provided is a microscopic specimen including a lower plate that includes a lower opening portion, an upper plate that covers the lower opening portion, a target material layer on the upper plate, a lower electrode layer between the upper plate and the target material layer, an upper electrode layer on the target material layer, and a wiring pattern electrically connected to each of the upper electrode layer and the lower electrode layer.
Claims20
A microscopic specimen comprising:
- a lower plate including a lower opening portion;
- an upper plate configured to cover the lower opening portion;
- a target material layer on the upper plate;
- a lower electrode layer between the upper plate and the target material layer;
- an upper electrode layer on the target material layer;
- and
- a wiring pattern electrically connected to each of the upper electrode layer and the lower electrode layer.
4 more elements
An analysis method comprising:
- a process (a) of disposing a specimen in a microscope;
- a process (b) of emitting an electron beam passing through the specimen;
- and
- a process (c) of obtaining analysis information from a diffracted electron beam of the passed electron beam,
- wherein the specimen comprises:
- a lower plate including a lower opening portion;
- an upper plate configured to cover the lower opening portion;
- a target material layer on the upper plate;
- and
- a lower electrode layer between the upper plate and the target material layer,
- wherein, in the process (b), the electron beam passes through the target material layer, the lower electrode layer, the upper plate, and the lower plate in sequence.
8 more elements
Dependencies are inferred from the claim text.