Charged particle beam device and sample observation method

A charged particle beam device comprising:

• a charged particle optical system;
• a stage;
• a sample chamber including a conductive layer to be irradiated with a charged particle beam from the charged particle optical system, a first insulating layer laminated with the conductive layer, and a second insulating layer facing the first insulating layer, the sample chamber being mounted on the stage and configured to hold a sample between the first insulating layer and the second insulating layer;
• an amplifier that amplifies a potential change that occurs at an interface between the first insulating layer and the sample as the conductive layer of the sample chamber is irradiated with the charged particle beam, and outputs the amplified result as a measurement signal;
• a main control unit that controls the charged particle optical system and the stage, and that also converts the measurement signal from the amplifier into image data and corrects the image data with a deconvolution filter to generate corrected image data;
• a display unit including an observation image display unit and a filter adjustment unit that displays setting information of the deconvolution filter used in the main control unit;
• and
• an information processing device that displays the corrected image data on the observation image display unit, and when the setting information of the deconvolution filter displayed in the filter adjustment unit is changed, adjusts the deconvolution filter used in the main control unit according to the changed setting information, wherein
• the information processing device registers a plurality of filter functions that are relationships between taps of the filter and filter coefficients given to each tap, and generates filter setting data as one of the filter functions is selected in the filter adjustment unit, and parameters of the selected filter function are adjusted, and
• the main control unit sets the deconvolution filter for correcting the image data based on the filter setting data.