Device having an anodic porous region surrounded by a trench having an electrical isolation barrier
AssigneeMurata Manufacturing Co., Ltd.
InventorsBrigitte Soulier, Frédéric Voiron
Life of this patent
Estimating the term…
Abstract
An electrical device that includes: a metal barrier layer; an anodic porous oxide region on the metal barrier layer; a trench around the anodic porous oxide region reaching the metal barrier layer; a liner at least on a wall of the trench on a side of the anodic porous oxide region forming an electrical isolation barrier and having an opening onto the anodic porous oxide region; a hard mask arranged above the trenches and the liner having an opening onto the anodic porous oxide region. A corresponding manufacturing method is also disclosed.
Claims15
An electrical device comprising:
- a metal barrier layer;
- an anodic porous oxide region on the metal barrier layer;
- a trench around the anodic porous oxide region reaching the metal barrier layer;
- a liner at least on a wall of the trench on a side of the anodic porous oxide region forming an electrical isolation barrier and having an opening onto the anodic porous oxide region;
- and
- a hard mask arranged above the trenches and the liner having at least an opening onto the anodic porous oxide region.
A method of manufacturing an electrical device comprising an anodic porous oxide region, the method comprising:
- forming an anodizable metal layer on a metal barrier layer;
- forming a trench in the anodizable metal layer around a portion of the anodizable metal layer which will include the anodic porous oxide region after anodizing, the trench reaching the metal barrier layer;
- forming a liner at least on a wall of the trench on a side of a portion of the anodizable metal layer having an opening onto the anodic porous oxide region;
- forming a hard mask above the trenches and the liner, having at least an opening onto the portion of the anodizable metal layer;
- and
- anodizing the portion of the anodizable metal layer so as to obtain the anodic porous oxide region and form an electrical device that includes:
- the metal barrier layer;
- the anodic porous oxide region on the metal barrier layer;
- the trench around the anodic porous oxide region and reaching the metal barrier laver;
- the liner at least on the wall of the trench on a side of the anodic porous oxide region forming an electrical isolation barrier and having the opening onto the anodic porous oxide region;
- and
- the hard mask arranged above the trenches and the liner having at least an opening onto the anodic porous oxide region.
Dependencies are inferred from the claim text.