Ultrasensitive, ultrathin vapor sensors and arrays

A method of detecting an analyte, the method comprising:

• providing a sensor array comprising a first sensor and a second sensor, the first sensor comprising a first microheater layer and a first catalyst layer in contact with the first microheater layer, the second sensor comprising a second microheater layer;
• delivering power to the first and second sensors to heat the first sensor to a first setpoint temperature and to heat the second sensor to a second setpoint temperature;
• exposing the first and second sensors to an analyte such that the first catalyst layer reacts with the analyte to generate a thermal response;
• varying power applied to the first sensor and/or the second sensor to account for the thermal response to maintain the first setpoint temperature and the second setpoint temperature;
• and
• determining an existence, identity, and/or concentration of the analyte based on varying the power.

A detection device comprising:

• a substrate layer;
• a microheater layer configured to receive power at a first power level to reach a setpoint temperature;
• and
• a catalyst layer in contact with the microheater layer, the catalyst layer comprising a catalyst configured to undergo a chemical reaction when exposed to an analyte, the chemical reaction being endothermic or exothermic,
• wherein the microheater layer is configured to receive power at a second power level to maintain the setpoint temperature after the catalyst begins the chemical reaction, and
• wherein a heat effect indicative of information on the analyte is determined by comparing the second power level to the first power level.