X-ray inspection apparatus used for an inspection of a substrate, X-ray inspection system, image management method and program
AssigneeOMRON Corporation
InventorHironori Kasahara
Life of this patent
Estimating the term…
Abstract
An X-ray inspection apparatus is used for an inspection of a substrate, and the X-ray inspection apparatus includes an image acquisition unit that acquires a plurality of tomographic images for the substrate, an image extraction unit that extracts, from a data set obtained based on the plurality of tomographic images, an inspection tomographic image that is a target for determining whether the substrate is acceptable or not, a saved data generation unit that generates predetermined saved data including at least the inspection tomographic image, and a saved data storage unit that stores the saved data.
Claims15
An X-ray inspection apparatus used for an inspection of a substrate, the X-ray inspection apparatus comprising:
- (i) at least one memory configured to store computer-executable instructions and at least one processor configured to execute the computer-executable instructions stored in the at least one memory, (ii) at least one integrated circuit, or both (i) and (ii) that implement:
- an image acquisition unit that acquires a plurality of tomographic images for the substrate;
- an image extraction unit that extracts, from a data set obtained based on the plurality of tomographic images, an inspection tomographic image that is a target for determining whether the substrate is acceptable or not;
- and
- a saved data generation unit that generates predetermined saved data including at least the inspection tomographic image;
- and
- a saved data storage device that stores the saved data,
- wherein the saved data generation unit generates the saved data only for the substrate for which a result of the inspection indicates defective, and
- the saved data storage device stores the saved data on a long-term basis.
An X-ray inspection system used for an inspection of a substrate, the X-ray inspection system comprising:
- an X-ray source that irradiates the substrate that is an inspection target with X-rays;
- an X-ray camera that takes an X-ray tomographic image transmitted through the substrate;
- (i) at least one memory configured to store computer-executable instructions and at least one processor configured to execute the computer-executable instructions stored in the at least one memory, (ii) at least one integrated circuit, or both (i) and (ii) that implement:
- an image acquisition unit that acquires a plurality of tomographic images for the substrate;
- an image extraction unit that extracts, from a data set obtained based on the plurality of tomographic images, an inspection tomographic image that is a target for determining whether the substrate is acceptable or not;
- and
- a saved data generation that generates predetermined saved data including at least the inspection tomographic image;
- and
- a saved data storage device that stores the saved data,
- wherein the saved data generation unit generates the saved data only for the substrate for which a result of the inspection indicates defective, and
- the saved data storage device stores the saved data on a long-term basis.
An image management method for an X-ray inspection of a substrate, the image management method comprising:
- acquiring a plurality of tomographic images for the substrate;
- extracting, from a data set obtained based on the plurality of tomographic images, an inspection tomographic image that is a target for determining whether the substrate is acceptable or not;
- acquiring information about an inspection result of the substrate;
- determining whether to generate predetermined saved data including at least the inspection tomographic image for the substrate based on a predetermined processing condition corresponding to the inspection result;
- generating the saved data in a case where it is determined at the determining that the predetermined saved data is generated;
- and
- storing the generated saved data,
- wherein the saved data is generated only for the substrate for which a result of the inspection indicates defective, and
- the generated saved data is stored on a long-term basis.
Dependencies are inferred from the claim text.