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US 12,405,177 B2Granted
Electrode structure for high-sensitivity protrusion-type pressure sensor and method for manufacturing the same
AssigneeIndustry-Academic Cooperation Foundation, Yonsei University
InventorsJin-woo Park, Soyeon Lee, Seung-Rok Kim
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Abstract
Provided are an electrode structural body for a highly sensitive protrusion type pressure sensor and a method for manufacturing the same. According to the electrode structural body of the present invention, an electrode is formed along a protruding structure, so that deformation of the protruding structure may be sufficiently sensed to achieve high sensitivity even in a low pressure range and a polymer layer may be further introduced to the outside of the electrode to achieve excellent stability.
Claims6
An electrode structural body comprising:
- a substrate including two or more protruding portions including a first polymer;
- and
- an electrode layer conformally positioned along a surface of the two or more protruding portions,
- wherein a spacing between the adjacent protruding portions is 100 μm or more.
1 more element
Dependencies are inferred from the claim text.