Vacuum pump and control device
AssigneeEdwards Japan Limited
InventorHideo Fukami
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AssigneeEdwards Japan Limited
InventorHideo Fukami
Estimating the term…
A vacuum pump including: a current measuring means that measures a current flowing through a motor, in which a first region defined such that a current measured value flowing through the motor is equal to or larger than a current specified value and a rotational speed measured value of a rotor blade is equal to or larger than a rotational speed specified value, a second region defined such that the current measured value flowing through the motor is less than the current specified value or the rotational speed measured value of the rotor blade is less than the rotational speed specified value, a region determining means that determines which region a rotational speed measured value and the current measured value belong, and a calculating means that calculates a risk degree of a failure of the vacuum pump with elapse of time based on the determination by the region determining means.
A vacuum pump comprising:
A control device of a vacuum pump including:
Dependencies are inferred from the claim text.