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US 12,404,215 B2Granted
Ceramic susceptor and manufacturing method thereof
AssigneeKsm Component Co., Ltd.
InventorsYun Ho Kim, Joo Hwan Kim, Hwan Young Park, Bo Sung Kim, Hyun Taek Lee
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Abstract
A ceramic susceptor particularly with excellent volumetric resistance at high temperatures and thermal conductivity at room temperature compared to a typical ceramic susceptor and a method for manufacturing the same are disclosed. The ceramic susceptor is characterized by comprising alumina (Al2O3); and aluminum nitride (AlN), and not comprising a secondary phase including an aluminum oxynitride phase (AlON phase).
Claims10
A ceramic susceptor which comprises alumina (Al2O3);
- and
- aluminum nitride (AlN), and which does not comprise a secondary phase including an aluminum oxynitride phase (AlON phase),
- wherein a content of the alumina is in excess of 68% by weight and less than 95% by weight, and a content of the aluminum nitride is in excess of 5% by weight and less than 32% by weight,
- wherein the ceramic susceptor has a volumetric resistance rate of 1.0E+10 to 1.0E+13 Ω·cm at 500° C. and a thermal conductivity of 30 to 60 W/m·k or more at room temperature, and
- wherein the ceramic susceptor further comprises yttria (Y2O3) in an amount of 0.05 to 0.5 parts by weight, based on a total weight of 100 parts by weight of the alumina and the aluminum nitride.
2 more elements
Dependencies are inferred from the claim text.