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US 12,404,169 B2Granted
Large-scale plasmonic hybrid framework with built-in nanohole arrays as multifunctional optical sensing platforms
AssigneePurdue Research Foundation
InventorsHaiyan Wang, Xuejing Wang, Xinghang Zhang
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Abstract
A nanohole template is disclosed which includes a substrate and a vertically aligned nanocomposite (VAN) structure disposed over the substrate. The VAN structure is a metal nitride having circular periodic nanoholes of about 2 nm to about 20 nm in diameter.
Claims6
A nanohole template, comprising:
- a solid substrate;
- a vertically aligned nanocomposite (VAN) structure disposed over the substrate, the VAN structure is made from a transition metal-nitrides having circular periodic nanoholes of about 2 nm to about 20 nm in diameter, wherein the nanoholes are filled with a fluid, wherein the solid substrate and the VAN structure are made of dissimilar materials,
- wherein the solid substrate material is selected from the group consisting of Si, SiO2, MgO, SrTiO3, LaALO3, glass, and combinations thereof, and
- wherein the VAN structure material is selected from the group consisting of TiN, TaN, ZrN, HfN, and combinations thereof.
1 more element
Dependencies are inferred from the claim text.