MEMS device

A micro electro mechanical system (MEMS) device, wherein the MEMS device comprises:

• a package, a bottom plate, and a first inertial component;
• the bottom plate and the package form a packaging space between the bottom plate and the package, the first inertial component is located in the packaging space, the first inertial component is mounted on the bottom plate at a preset angle, and the preset angle is greater than 0 degrees and less than 180 degrees;
• the first inertial component comprises an inertial device, a flexible substrate, and a processor, the inertial device and a first portion of the flexible substrate are sequentially arranged with and connected to the processor, and a second portion of the flexible substrate that is different from the first portion is connected to a surface that is of the bottom plate and that faces the packaging space;
• and
• a first electrode of the inertial device is electrically connected to a first output electrode of the processor, a second electrode of the inertial device is electrically connected to an input electrode of the processor, a second output electrode of the processor is electrically connected to an electrode of the first portion, the electrode of the first portion is electrically connected to an electrode of the second portion, and the electrode of the second portion is electrically connected to an electrode on the surface that is of the bottom plate and that faces the packaging space.