Dilute chemical solution production device
AssigneeKurita Water Industries Ltd.
InventorsWataru Sugita, Yuichi Ogawa
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AssigneeKurita Water Industries Ltd.
InventorsWataru Sugita, Yuichi Ogawa
Estimating the term…
Dilute chemical solution production device (1) has a plunger pump and a chemical solution supply pipe (3) that supply a chemical solution S from a chemical solution reservoir. The end of the chemical solution supply pipe (3) serves as an injection point 11 for the chemical solution (S). The chemical solution supply pipe (3) is inserted to an approximately central position in the radial direction of an ultrapure water passage (12), which is a first pipe, via a bore-through joint (13). Conductivity meter (14) as a conductivity measuring meter is provided on the downstream side of the bore-through joint (13), which serves as the injection point (11), and is connected to a controller so that the plunger pump (4) can be controlled in accordance with the measured value of the conductivity meter (14).
A dilute chemical solution production device that produces a dilute chemical solution of a second liquid by adding the second liquid to a first liquid, the dilute chemical solution production device comprising:
Dependencies are inferred from the claim text.