Vertical cavity surface emitting laser design and method
OwnerJiaqi Cheng, Jordan Peckhaminventors
Life of this patent
Estimating the term…
Abstract
A microcavity pixel design and structure allowing for tuning the optical cavity length of the microcavity of a microcavity pixel structure. This is achieved by including an intermediate electrode in the device which has an overhang region to form a connecting area to a bottom electrode, alleviating design restrictions in material type and dimensions throughout the optical microcavity tuning process. A method for the fabrication of a multi-colored microcavity pixel array facilitating the use of blanket deposition methods for select layers within a microcavity pixel structure.
Claims22
A vertical cavity surface emitting laser (VCSEL) device comprising:
- a substrate;
- a bottom first electrode on the substrate;
- a first Distributed Bragg Reflector (DBR) comprising multiple layers alternating between a high refractive index material and a low refractive index material;
- an intermediate electrode comprising an overhang region and a connecting area, the overhang region and the connecting area electrically connecting the intermediate electrode to the bottom first electrode;
- a definition layer covering the overhang region and leaving a portion of the intermediate electrode uncovered forming an active area of the intermediate electrode;
- a light emitting stack on top of the active area of the intermediate electrode;
- a top electrode on top of the light emitting stack;
- and
- a second Distributed Bragg Reflector (DBR) deposited on top of the top electrode.
A method for fabrication of a vertical cavity surface emitting laser (VCSEL) device comprising:
- a substrate;
- depositing a bottom first electrode on the substrate;
- depositing a first Distributed Bragg Reflector (DBR) comprising multiple layers alternating between a high refractive index material and a low refractive index material on the bottom first electrode;
- depositing an intermediate electrode above the first DBR, the intermediate electrode comprising an overhang region and a connecting area, the overhang region and the connecting area electrically connecting the intermediate electrode to the bottom first electrode;
- depositing a definition layer covering the overhang region and leaving a portion of the intermediate electrode uncovered forming an active area of the intermediate electrode;
- depositing a light emitting stack on top of the active area of the intermediate electrode;
- depositing a top electrode on top of the light emitting stack;
- and
- depositing a second DBR on top of the top electrode.
A vertical cavity surface emitting laser (VCSEL) comprising:
- an array of vertical surface emitting laser (VCSEL) devices, each VCSEL device comprising:
- a substrate;
- a bottom first electrode on the substrate;
- a first Distributed Bragg Reflector (DBR) comprising multiple layers alternating between a high refractive index material and a low refractive index material;
- an intermediate electrode comprising an overhang region and a connecting area, the overhang region and the connecting area electrically connecting the intermediate electrode to the bottom first electrode;
- a definition layer covering the overhang region and leaving a portion of the intermediate electrode uncovered forming an active area of the intermediate electrode;
- a light emitting stack on top of the active area of the intermediate electrode;
- a top electrode on top of the light emitting stack;
- and
- a second DBR on top of the top electrode.
Dependencies are inferred from the claim text.