Co-integrated resonant tunneling diode and field effect transistor
AssigneeInternational Business Machines Corporation
InventorsEunjung Cha, Bogdan Cezar Zota, Kirsten Emilie Moselund, Katarzyna Hnida-Gut
Life of this patent
Estimating the term…
Loading patent…
AssigneeInternational Business Machines Corporation
InventorsEunjung Cha, Bogdan Cezar Zota, Kirsten Emilie Moselund, Katarzyna Hnida-Gut
Estimating the term…
One or more systems, devices and/or methods provided herein relate to a device that can facilitate generation of a pulse to affect a qubit and to a method that can facilitate fabrication of a semiconductor device. The semiconductor device can comprise an RTD and an FET co-integrated in a common layer extending along a substrate. A method for fabricating the semiconductor device can comprise applying, at a substrate layer, a template structure comprising an opening, a cavity and a seed structure comprising a seed material and a seed surface, and sequentially growing along the substrate a plurality of diode layers of an RTD and a plurality of transistor layers of an FET within the cavity of the template structure from the seed surface, wherein the RTD and FET are co-integrated along the substrate.
A semiconductor device comprising:
Dependencies are inferred from the claim text.