Transfer conveyor system for semiconductor inspecting apparatus using moving magnet

A transfer conveyor system for a semiconductor inspecting apparatus using a moving magnet, comprising:

• a carrier in which a semiconductor wafer or a substrate is seated and accommodated and which is transferred;
• an armature which is provided to be accommodated in a permanent magnet plate under the carrier and includes a plurality of permanent magnets disposed in a longitudinal direction of the carrier;
• a stator which is disposed to be spaced apart from the armature, is fixedly installed on a guide rail, and includes a plurality of motor coils configured to interact with a magnetic field generated by the permanent magnets of the armature;
• a sensor unit which is installed at each of two ends of each motor coil, detects whether the armature approaches, senses a variation of the magnetic field, and measures a position of the armature from speed information of the armature;
• and
• a carrier monitoring unit which is provided on the carrier and monitors the carrier to detect an abrasion degree, a damage state, or an alignment/misalignment of the carrier in real time,
• wherein the carrier monitoring unit includes:
• a speed sensor configured to measure a speed and acceleration;
• a pressure sensor configured to measure pressure;
• a temperature/humidity sensor configured to detect temperature/humidity of an outer surface of the carrier and temperature/humidity of the carrier;
• an inclination angle sensor configured to measure inclination;
• and
• a frequency detection sensor configured to detect a degree of vibration of the carrier from a measurement frequency measured in the carrier.