Apparatus for transporting substrate and system for treating substrate with the apparatus
AssigneeSemes Co., Ltd.
InventorsSun Ho Ha, Duk Hyun Son
Life of this patent
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Abstract
Provided are a substrate transporting apparatus capable of preventing an increase in temperature of a transporting robot by installing a cooling plate around the transporting robot, and a substrate treating system including the same. The substrate transporting apparatus includes a transporting unit for transporting a substrate; and a cooling plate for controlling a temperature of the transporting unit, wherein the cooling plate is spaced apart from a side surface of the transporting unit and installed as a side wall, or is installed in close contact with the side surface of the transporting unit.
Claims10
A system for treating a substrate comprising:
- a substrate transporting apparatus operated in a vacuum state;
- and
- a plurality of process chambers disposed along a first direction and disposed on both sides of the substrate transporting apparatus along a second direction perpendicular to the first direction,
- wherein the substrate transporting apparatus comprises:
- a transporting robot loading a substrate into the plurality of process chambers or unloading the substrate from the plurality of process chambers, and linearly moving along the first direction;
- a guide rail provided as a moving path of the transporting robot and disposed parallel to the first direction;
- and
- a cooling plate installed as a side wall extending along the guide rail and a flow path, through which coolant flows, is installed inside the cooling plate.
Dependencies are inferred from the claim text.