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US 12,400,814 B2Granted
Electronic module and apparatus
AssigneeRobert Bosch GmbH
InventorsOliver Raab, Markus Schwarz, Hans Santos Wilke, Stefan Kiefl
Life of this patent
Estimating the term…
Abstract
Various embodiments of the teachings herein include an electronic module. The module may include: an electrical circuit; a first MEMS switch having a first control contact with a first switching threshold voltage; and a second MEMS switch having a second control contact with a second switching threshold voltage different than the first. The first control contact and the second MEMS switch are linked to the electrical circuit.
Claims12
An electronic module comprising:
- an electrical circuit;
- a first micro-electromechanical system (MEMS) switch having a first control contact with a first switching threshold voltage;
- and
- a second MEMS switch having a second control contact with a second switching threshold voltage different than the first;
- wherein the first control contact and the second control contact are linked to the electrical circuit and connected to a common ground;
- and
- wherein a difference between the first switching threshold voltage and the second switching threshold voltage is defined by a difference in at least one geometric and/or material parameter of the respective MEMS switch selected from the group consisting of:
- a length of a bending element, a width of the bending element, a thickness of the bending element, an electrode spacing, a dielectric stress, a layer stress, and a layer material.
5 more elements
An apparatus comprising:
- a control module;
- an electrical circuit;
- a first MEMS switch having a first control contact with a first switching threshold voltage;
- and
- a second MEMS switch having a second control contact with a second switching threshold voltage different than the first;
- wherein the first control contact and the second control contact are linked to the electrical circuit and connected to a common ground;
- wherein a difference between the first switching threshold voltage and the second switching threshold voltage is defined by a difference in at least one geometric and/or material parameter of the respective MEMS switch selected from the group consisting of:
- a length of a bending element, a width of the bending element, a thickness of the bending element, an electrode spacing, a dielectric stress, a layer stress, and a layer material.
5 more elements
Dependencies are inferred from the claim text.