Information processing apparatus, information processing system, and part ordering method

An information processing system comprising:

• a controller configured to control a semiconductor manufacturing apparatus and generate an order for a part of the semiconductor manufacturing apparatus that needs to be replaced, the controller comprising:
• a memory;
• and
• a processor coupled to the memory;
• a parts purchasing management server configured to receive and notify the order;
• and
• a factory-side server configured to perform an inventory management or a production management of parts based on the order notified from the controller via the parts purchasing management server,
• wherein the processor is configured to:
• acquire physical sensor data measured in the semiconductor manufacturing apparatus that is performing a process according to process parameters;
• execute a simulation of a state of the process by using a simulation model of the semiconductor manufacturing apparatus according to the process parameters, and output virtual sensor data;
• based on determination that the physical sensor data and the virtual sensor data do not match each other and a difference between the physical sensor data and the virtual sensor data is equal to or less than a predetermined threshold value greater than 0,
• adjust the process parameters for optimization;
• and
• based on determination that the difference between the physical sensor data and the virtual sensor data exceeds the predetermined threshold value,
• stop the process parameter adjustment;
• perform a failure pre-detection and a maintenance time pre-detection of the semiconductor manufacturing apparatus based on the difference between the physical sensor data and the virtual sensor data to pre-detect a part of the semiconductor manufacturing apparatus that needs to be replaced;
• generate the order for the part of the semiconductor manufacturing apparatus that needs to be replaced, based on a result of the pre-detection, to notify the parts purchasing/management server such that upon receipt of the notification, the parts purchasing/management server orders the part from the factory-side server;
• specify a maintenance item necessary for the semiconductor manufacturing apparatus based on the part of the semiconductor manufacturing apparatus that needs to be replaced, based on the result of the pre-detection;
• generate a maintenance list by associating the specified maintenance item with at least one of a procedure manual for performing a maintenance task of the maintenance item, contents for supporting the maintenance task of the maintenance item, and information on tools necessary for the maintenance task of the maintenance item;
• generate a maintenance task request based on the maintenance list;
• manage the task of the maintenance item in the maintenance list;
• in response to a maintenance task end notification to notify of an ended maintenance task of the maintenance item, optimize the process parameters according to the ended maintenance task and acquire the physical sensor data based on the optimized process parameters;
• and
• in response to a specification change, edit the simulation model such that the difference between the physical sensor data and the virtual sensor data is reduced and execute the simulation based on the edited simulation model.