Scatter diagram display device, scatter diagram display method, and analyzer

A scatter diagram display device that creates a plurality of scatter diagrams based on mapping data acquired by an analyzer and displays a scatter diagram matrix in which the created plurality of scatter diagrams is arranged in a matrix on a display section, the scatter diagram display device comprising:

• a display condition acceptance section that accepts a designation of a display range of an item in each of the plurality of scatter diagrams;
• and
• a display control section that extracts all scatter diagrams having the item whose display range has been designated from the plurality of scatter diagrams and changes the display range of the item in the extracted scatter diagrams based on the designation of the display range,
• wherein the analyzer is configured to scan a specimen with an electron probe and detect X-rays generated from the specimen in response to the scanning;
• wherein the mapping data are obtained for each element and include information on positions on the specimen and an X-ray intensity at each of the positions;
• wherein each of the plurality of scatter diagrams has two axes which represent signal intensity of elements which are different from each other;
• wherein, in the scatter diagram matrix, the plurality of scatter diagrams created by combining elements which are different from each other are arranged;
• wherein the display condition acceptance section is further configured to accept a lower limit value and an upper limit value of signal intensity of elements, as the designation of the display range of the item in each of the plurality of scatter diagrams;
• and
• wherein the display control section is further configured to extract all scatter diagrams having an axis representing signal intensity of a designated element from the plurality of scatter diagrams, and to change a range of the axis representing signal intensity of the designated element in the extracted scatter diagrams to have the designated lower and upper limit values.