Flat ceramic pressure sensor and relative production method
AssigneeKolektor Microtel S.P.A.
InventorsRoberto May, Filippo Canti, George Mergenthaler
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AssigneeKolektor Microtel S.P.A.
InventorsRoberto May, Filippo Canti, George Mergenthaler
Estimating the term…
The piezoresistive or capacitive flat pressure sensor (130) includes a flexible flat membrane (100) made of ceramic material and a relative rigid flat support (110) made of ceramic material, wherein the support (110) has a first main face (220) and a second main face (230), and the membrane (100) has a first main face (200) and a second main face (210), and wherein the first main face (200) of the membrane (100) faces the second main face (230) of the support (110), the first main face (200) of the membrane (100) comprising at least one first electrical circuit (501), the first main face (220) of the support (110) comprising at least one second electrical circuit (502). On the perimeter of the rigid flat support (110), an electrical connection is provided between the first electrical circuit (501) and the second electrical circuit (502).
A piezoresistive or capacitive flat pressure sensor (130), comprising a flexible flat membrane (100) made of ceramic material and a relative rigid flat support (110) made of ceramic material, wherein said support (110) has a first main face (220) and a second main face (230), and said membrane (100) has a first main face (200) and a second main face (210), and wherein said first main face (200) of said membrane (100) faces said second main face (230) of said support (110), said first main face (200) of said membrane (100) comprising at least one first electrical circuit (501), said first main face (220) of said support (110) comprising at least one second electrical circuit (502);
A method for producing a flat pressure sensor (130) comprising a flexible flat membrane (100) made of ceramic material and a relative rigid flat support (110) made of ceramic material, wherein said support (110) has a first main face (220) and a second main face (230), and said membrane (100) has a first main face (200) and a second main face (210), and in which said first main face (200) of said membrane (100) faces said second main face (230) of said support (110), the method comprising the following steps:
Dependencies are inferred from the claim text.