Apparatus, system, and method for measuring the temperature of a substrate

A temperature measuring apparatus for a substrate, comprising:

• a light emitting source, which, in operation, produces light signals, the light signals having transverse magnetic waves and transverse electric waves;
• a polarizer configured to receive the light signals including the transverse magnetic waves and the transverse electric waves from the light emitting source, polarize the received light signals and transmit polarized light signals toward a substrate, wherein the polarized light signals include the transverse electric waves of the light signals;
• a detector, which, in operation:
• receives reflectivity signals that includes the transverse electric waves of the light signals reflected from a surface of the substrate, and
• receives emission signals emitted from the surface of the substrate, wherein the emission signals are representative of at least one of a temperature or energy density of the surface of the substrate;
• a first movable stage having thereon mounted the light emitting source and the detector, the first movable stage configured to move the light emitting source and the detector;
• and
• a processor configured to process the emission signals and the reflectivity signals,
• wherein the processor evaluates the temperature of the surface of the substrate based on the following equation:
• T
• =
• A
• ln
• (
• 1
• +
• B
• .
• ε
• TRE
• )
• wherein T is the temperature of the substrate, A and B are a constant parameter, ϵ is emissivity which equals 1−R %, R is the reflectivity signals, and TRE is the emission signals.

A temperature evaluating system, comprising:

• a light emitting source configured to produce light signals, the light signals having transverse magnetic waves (TM) and transverse electric waves (TE);
• a polarizer configured to polarize the light signals having the transverse waves and transverse electric waves;
• a detector configured to:
• receive the polarized light signals reflected from a substrate, the reflected polarized light signals being reflected at a surface of the substrate;
• receive emission signals associated with at least one of a temperature or energy density of the surface of the substrate;
• and
• one or more processors operatively coupled to the detector, the one or more processors configured to evaluate the temperature of the surface of the substrate using the reflected polarized light signals and the emission signals,
• wherein the light emitting source is positioned such that the light signals after being polarized by the polarizer is at an incident angle between about 10° to 80° with respect to the surface of the substrate.