Fluid vaporizers

A vaporizer apparatus comprising:

• a liquid inlet;
• a plurality of plates in a stacked arrangement, the plurality of plates comprising openings and surfaces defining a tortuous path for a liquid through the plurality of plates,
• wherein the plurality of plates is configured to direct a flow of the liquid through the tortuous path from a first end corresponding to a first plate of the plurality of plates and output a vapor of the liquid at a second end of the tortuous path corresponding to a last plate of the plurality of plates;
• and
• at least one heating element configured to heat the plurality of plates to vaporize the liquid along its flow through the tortuous path and generate the vapor,
• wherein the plurality of plates comprise a first type of plate and a second type of plate, wherein the first type of plate and the second type of plate have openings in different lateral positions, and
• wherein the first type of plate and the second type of plate alternate along the tortuous path.

A vaporizer apparatus comprising:

• a liquid inlet;
• a plurality of plates in a stacked arrangement, the plurality of plates comprising openings and surfaces defining a tortuous path for a liquid through the plurality of plates,
• wherein the plurality of plates is configured to direct a flow of the liquid through the tortuous path from a first end corresponding to a first plate of the plurality of plates and output a vapor of the liquid at a second end of the tortuous path corresponding to a last plate of the plurality of plates;
• and
• at least one heating element configured to heat the plurality of plates to vaporize the liquid along its flow through the tortuous path and generate the vapor,
• wherein the at least one heating element comprises a cartridge heater extending through two or more of the plurality of plates.

A vaporizer apparatus comprising:

• a liquid inlet;
• a plurality of plates in a stacked arrangement, the plurality of plates comprising openings and surfaces defining a tortuous path for a liquid through the plurality of plates,
• wherein the plurality of plates is configured to direct a flow of the liquid through the tortuous path from a first end corresponding to a first plate of the plurality of plates and output a vapor of the liquid at a second end of the tortuous path corresponding to a last plate of the plurality of plates;
• and
• at least one heating element configured to heat the plurality of plates to vaporize the liquid along its flow through the tortuous path and generate the vapor,
• wherein the vaporizer apparatus is configured to deliver the vapor to a chamber in the absence of a carrier gas, wherein the plurality of plates comprise two plates in succession along the tortuous path, wherein the two plates are oriented parallel to one another and spaced apart along a stack direction, and wherein the two plates comprise respective openings arranged at different lateral positions.