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US 12,398,830 B2Granted
Piping structure and processing apparatus
AssigneeTokyo Electron Limited
InventorsMasato Kadobe, Hiromi Nitadori
Life of this patent
Estimating the term…
Abstract
A piping structure includes a plurality of pipes that connects a plurality of process modules disposed adjacent to each other at a first room and a plurality of vacuum pumps disposed at a second room below the first room to be corresponding to the plurality of process modules, respectively. The plurality of pipes are divided into a plurality of blocks in a height direction, and the plurality of pipes used for blocks in an identical height have an identical shape.
Claims11
A piping structure comprising:
- a plurality of pipes configured to connect a plurality of process modules disposed adjacent to each other at a first room and a plurality of vacuum pumps disposed at a second room below the first room to be corresponding to the plurality of process modules, respectively,
- wherein the plurality of pipes are divided into a plurality of regions in a height direction, and the plurality of pipes used for regions in an identical height have an identical shape,
- each of the plurality of pipes includes partial pipes provided for each of the plurality of regions in the height direction, respectively, and the partial pipes are connected to each other to constitute each of the plurality of pipes,
- each of the partial pipes includes an inclined portion provided to have an inclination and a straight portion extending in a vertical direction,
- the straight portions of the plurality of partial pipes are parallel to each other,
- the plurality of pipes pass through holes defined in a structure spaced apart from the first room and the second room, respectively, and
- in each of the plurality of pipes, a first inclined portion of a first partial pipe and a second inclined portion of a second partial pipe at opposite ends of a first straight portion of the first partial pipe disposed in the hole of the structure have different lengths from each other when viewed from above.
4 more elements
A processing apparatus comprising:
- a plurality of process modules disposed adjacent to each other at a first room;
- a plurality of vacuum pumps disposed in a second room below the first room and provided to be corresponding to the plurality of process modules;
- and
- a plurality of pipes configured to connect the plurality of process modules and the plurality of vacuum pumps, respectively,
- wherein the plurality of pipes are divided into a plurality of regions in a height direction, and the plurality of pipes used for regions in an identical height have an identical shape,
- each of the plurality of pipes includes partial pipes provided for each of the plurality of regions in the height direction, respectively, and the partial pipes are connected to each other to constitute each of the plurality of pipes,
- each of the partial pipes includes an inclined portion provided to have an inclination and a straight portion extending in a vertical direction,
- the straight portions of the plurality of partial pipes are parallel to each other,
- the plurality of pipes pass through holes defined in a structure spaced apart from the first room and the second room, respectively, and
- in each of the plurality of pipes, a first inclined portion of a first partial pipe and a second inclined portion of a second partial pipe at opposite ends of a first straight portion of the first partial pipe disposed in the hole of the structure have different lengths from each other when viewed from above.
7 more elements
Dependencies are inferred from the claim text.