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US 12,398,483 B2Granted
Ingot puller apparatus having a flange that extends from the funnel or from the silicon feed tube
AssigneeGlobalWafers Co., Ltd.
InventorsMatteo Pannocchia, Maria Porrini
Life of this patent
Estimating the term…
Abstract
Methods for growing single crystal silicon ingots that involve silicon feed tube inert gas control are disclosed. Ingot puller apparatus that include a flange that extends radially from a silicon funnel or from a silicon feed tube to reduce backflow of gases from the silicon feed tube into the growth chamber are also disclosed.
Claims6
An ingot puller apparatus for manufacturing a single crystal silicon ingot, the ingot puller apparatus comprising:
- a crucible assembly for holding a silicon melt;
- a crystal puller housing that defines a growth chamber for pulling a silicon ingot from the melt, the crucible assembly being disposed within the growth chamber;
- a silicon feed tube for adding solid silicon to the crucible assembly, the silicon feed tube extending into the growth chamber;
- a funnel that at least partially extends into the silicon feed tube, the funnel and silicon feed tube being separated by a gap;
- and
- a flange that extends from the silicon feed tube, the flange extending fully across the gap to reduce backflow of gases from the silicon feed tube into the growth chamber, the flange being disposed above the silicon feed tube and contacting an upper end of the silicon feed tube, the funnel extending through the flange.
3 more elements
An ingot puller apparatus for manufacturing a single crystal silicon ingot, the ingot puller apparatus comprising:
- a crucible assembly for holding a silicon melt;
- a crystal puller housing that defines a growth chamber for pulling a silicon ingot from the melt, the crucible assembly being disposed within the growth chamber;
- a silicon feed tube for adding solid silicon to the crucible assembly, the silicon feed tube extending into the growth chamber;
- a funnel that at least partially extends into the silicon feed tube, the funnel and silicon feed tube being separated by a gap;
- and
- a flange that extends from the silicon feed tube, the flange extending fully across the gap to reduce backflow of gases from the silicon feed tube into the growth chamber, the flange being disposed within the silicon feed tube, the flange having an opening through which solid silicon passes.
3 more elements
Dependencies are inferred from the claim text.