Copper electroplating baths containing reaction products of amines, polyacrylamides and bisepoxoides
AssigneesRohm and Haas Electronic Materials LLC, Dow Global Technologies LLC
InventorsWeijing Lu, Lingli Duan, Zukhra Niazimbetova, Chen Chen, Maria Rzeznik
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Abstract
Copper electroplating baths include reaction products of amines, polyacrylamides and bisepoxides. The reaction products function as levelers and enable copper electroplating baths which have high throwing power and provide copper deposits with reduced nodules.
Claims9
A reaction product of a bisepoxide, an amine and an acrylamide, wherein the amine has a formula:
- wherein R′ is hydrogen;
- R comprises HO—(CH2)m—, or a moiety having a structure:
- where m is an integer from 2-12, n is an integer from 2-10, p is an integer from 1-10;
- and the acrylamide has a formula:
- wherein R″ is a moiety having a structure:
- a moiety having a structure:
- or
- a substituted or unsubstituted triazinane ring or a piperazine ring, wherein v, x and y are independently integers of 1 to 10;
- R16 and R17 are independently chosen from hydrogen and carbonyl moiety, and with the proviso that when R16 and R17 are carbonyl moieties, the carbonyl moieties form a covalent bond with the carbons of the vinyl groups of formula (VI) displacing a hydrogen to form the covalent bond with the carbons of the vinyl groups to form a five membered heterocyclic ring.
A reaction product of a bisepoxide, an amine and an acrylamide, wherein the amine has a formula:
- wherein R′ is hydrogen;
- R comprises HO—(CH2)m—, Q-(CH2)m—, a moiety having a structure:
- or
- a moiety having a structure:
- where R7-R14 are independently chosen from hydrogen and (C1-C3)alkyl;
- m is an integer from 2-12, n is an integer from 2-10, p is an integer from 1-10, q is an integer from 2-10 and r, s and t are numbers from 1 to 10;
- Q is a 5-6 membered heterocyclic ring having one or two nitrogen atoms in the ring or Q is a benzene sulfonamide moiety;
- and the acrylamide has a formula:
- wherein R″ is a moiety having a structure:
- wherein v, x and y are independently integers of 1 to 10.
A reaction product of a bisepoxide, an amine and an acrylamide, wherein the amine has a formula:
- wherein R′ is hydrogen;
- R comprises HO—(CH2)m—, Q-(CH2)m—, a moiety having a structure:
- or
- a moiety having a structure:
- where R7-R14 are independently chosen from hydrogen and (C1-C3)alkyl;
- m is an integer from 2-12, n is an integer from 2-10, p is an integer from 1-10, q is an integer from 2-10 and r, s and t are numbers from 1 to 10;
- Q is a 5-6 membered heterocyclic ring having one or two nitrogen atoms in the ring or Q is a benzene sulfonamide moiety;
- and the acrylamide has a formula:
- wherein R″ is a moiety having a substituted or unsubstituted triazinane ring or a piperazine ring.
Dependencies are inferred from the claim text.