Methods for controlling the pitch of self-assembled ionic liquid crystal (ILC) structures
AssigneeTokyo Electron Limited
InventorsDipak Aryal, Kate Abel, Takeo Nakano, Tamotsu Morimoto
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AssigneeTokyo Electron Limited
InventorsDipak Aryal, Kate Abel, Takeo Nakano, Tamotsu Morimoto
Estimating the term…
Embodiments of improved methods are provided to form ordered structures on a surface of a substrate using direct self-assembly (DSA) of ionic liquid crystals (ILCs). More specifically, various embodiments of methods are provided to control the pitch of a layered structure formed on a substrate surface via self-assembly of ILCs having cation head groups, alkyl tail groups and anions. In the embodiments disclosed herein, the pitch of the layered structure is controlled by: (a) controlling the cation/anion charge ratio of the cation head groups and anions included within the ILCs, and/or (b) adding an ionic liquid to a solution comprising the ILCs.
A method to control a pitch of a self-assembled ionic liquid crystal (ILC) structure formed on a substrate, the method comprising:
A method to control a pitch of a self-assembled ionic liquid crystal (ILC) structure formed on a substrate, the method comprising:
Dependencies are inferred from the claim text.