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US 12,398,152 B2Granted
Thioxanthone derivatives, composition comprising the same and pattern forming method comprising said composition
AssigneesLintfield Limited, Tokyo Electron Limited
InventorsChristopher Wall, Seiji Nagahara
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Abstract
Latent photoinitiator compounds are described, as well as compositions containing such compounds and their uses in photoinitiated methods for producing photoresist structures.
Claims16
A compound of the formula I:
- wherein n=1, 2, 3, 4 or 5;
- or
- a compound of the formula (Ia):
- wherein R=methyl, ethyl or propyl, and
- wherein one of the aromatic rings in the compound of formula I or the compound of formula Ia is substituted with at least two substituents independently selected from hydroxy, alkoxy, benzyloxy, alkylcarbonate, hydroxyalkyl, acetal, ester, oxyacetic acid and esters thereof, aryloxy or arylthio, and the other aromatic ring is unsubstituted or is substituted with at least one substituent independently selected from hydroxy, alkoxy, benzyloxy, alkylcarbonate, hydroxyalkyl, acetal, ester, oxyacetic acid and esters thereof, aryloxy and arylthio.
2 more elements
Dependencies are inferred from the claim text.