Functional coated article

A process to produce a scratch resistant coated article, the process comprising:

• providing a flat glass substrate having a surface to be coated;
• and
• depositing a multilayered coating on the surface in corresponding sequence coming from the surface:
• a functional layer stack (11, 11′, 11″) comprising at least one metallic silver inclusive layer (2, 4) sandwiched between two dielectric layers (1, 3, 5);
• a transition metal (TM) inclusive layer (6) comprising carbon in a molar amount, which at least at an outer surface of the TM inclusive layer equals at least to the molar metal amount of TM metal(s);
• and
• a hydrogen containing DLC (DLCH) layer (7) in direct contact to the outer surface of the TM inclusive layer as an outermost layer of the coating,
• wherein the hydrogen containing DLC (DLCH) layer (7) is deposited in direct contact to the TM inclusive layer as an outermost layer of the coating by an inductively coupled plasma process (ICPP) using a mixture of a carbonaceous gas and an inert gas, and
• wherein a DLCH layer (7) is produced having an average surface roughness as measured with atomic force microscopy (AFM) which is smaller 10 nm, having a hardness of the DLCH layer in a range from 6 GPa to 9 GPa, and having a mass density of the DLCH layer from 1.2 g/cm3 to 2.2 g/cm3.