Manufacturing method of modified aluminum nitride raw material, modified aluminum nitride raw material, manufacturing method of aluminum nitride crystals, and downfall defect prevention method
AssigneesKwansei Gakuin Educational Foundation, Toyo Aluminium Kabushiki Kaisha, Toyota Tsusho Corporation
InventorsTadaaki Kaneko, Daichi Dojima, Moeko Matsubara, Yoshitaka Nishio
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Abstract
The purpose of the present is to provide a modified AlN source for suppressing downfall defects. This manufacturing method of a modified aluminum nitride source involves a heat treatment step for heat treating an aluminum nitride source and generating an aluminum nitride sintered body.
Claims4
A modified aluminum nitride source comprising an aluminum nitride sintered body having a bulk density of 2.8 g/cm3 or more, an open porosity of 0 to 0.1%, a closed porosity of 0 to 14%, a carbon content of 200 ppm or less, and an oxygen content of 5,000 ppm or less.
A method for manufacturing a source material for crystal growth of an aluminum nitride, the method comprising a heat treatment step of subjecting an aluminum nitride source to a heat treatment to form an aluminum nitride sintered body, wherein the heat treatment step is a step of performing pressureless sintering, and includes a formation step of molding the aluminum nitride source to form an aluminum nitride formed body before the heat treatment step.
A method for manufacturing an aluminum nitride crystal, the method comprising a crystal growth step of growing an aluminum nitride crystal on an underlying substrate by using a modified aluminum nitride source manufactured by subjecting an aluminum nitride source to a heat treatment as a source material for crystal growth of aluminum nitride,
- wherein the modified aluminum nitride source has a bulk density of 2.8 g/cm3 or more, an open porosity of 0 to 0.1%, a closed porosity of 0 to 14%, a carbon content of 200 ppm or less, and an oxygen content of 5,000 ppm or less, and
- wherein in the crystal growth step, a growth surface of the underlying substrate faces upwards, and the source material is arranged at a position facing the growth surface.
Dependencies are inferred from the claim text.