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US 12,398,032 B2Granted
MEMS element and vibration-driven energy harvesting device
AssigneeKabushiki Kaisha Saginomiya Seisakusho
InventorsHisayuki Ashizawa, Noriko Shimomura
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Abstract
A MEMS element according to the present invention is provided with a base, an insulation layer fixed to one surface of the base, a first upper layer at least portions of which are fixed to the insulation layer, and a second upper layer provided surrounding the first upper layer and disposed being separated from the first upper layer by slits, wherein the first upper layer includes, at predetermined portions, protruding portions protruding toward the second upper layer, and the protruding portions are fixed to the insulation layer.
Claims9
A MEMS element comprising:
- a base;
- an insulation layer fixed to one surface of the base;
- a first upper layer, wherein at least portions of the first upper layer are fixed to the insulation layer, wherein the first upper layer comprises fixed electrode portions, each fixed electrode portion having an electrode pad, a lead portion, and a fixed-comb-teeth connection portion;
- and
- a second upper layer that surrounds the first upper layer, wherein the second upper layer is separated from the first upper layer by slits,
- wherein:
- the first upper layer includes, at predetermined portions, protruding portions protruding toward the second upper layer, wherein the protruding portions are provided on the lead portions of the fixed electrode portions at respective positions between the electrode pads and the fixed-comb-teeth connection portions or on the fixed-comb-teeth connection portions,
- portions of the insulation layer beneath the first upper layer are removed,
- the protruding portions have widths configured to fix the first upper layer to the insulation layer due to the removal of the portions of the insulation layer beneath the first upper layer, and
- the protruding portions are fixed to the insulation layer.
7 more elements
A MEMS element comprising:
- a base;
- an insulation layer fixed to one surface of the base;
- a first upper layer, wherein at least portions of the first upper layer are fixed to the insulation layer, wherein the first upper layer comprises a fixed electrode portion having an electrode pad, a lead portion, and a fixed-comb-teeth connection portion;
- and
- a second upper layer that surrounds the first upper layer, wherein the second upper layer is separated from the first upper layer by slits,
- wherein:
- the first upper layer includes, at a predetermined portion a protruding portion protruding toward the second upper layer, wherein the protruding portion is provided on the lead portion of the fixed electrode portion at a position between the electrode pad and the fixed-comb-teeth connection portion,
- the protruding portion has a first width sufficient to fix the first upper layer to the insulation layer,
- a lead portion of the first upper layer has a second width that is smaller than the first width and larger than a third width of the insulation layer beneath the lead portion,
- the slits include a portion formed to follow a contour of the protruding portion, and
- the protruding portions are fixed to the insulation layer.
8 more elements
Dependencies are inferred from the claim text.