Magnetron target coupling and support device

A bearing device comprising:

• a magnetron-target coupling comprising:
• a target coupling flange for coupling a tubular target;
• a shaft that is fixedly coupled to the target coupling flange and has a first linear bearing component at an end portion distal from the target coupling flange;
• a communication interface comprising:
• a first communication electrode disposed between the first linear bearing component and the target coupling flange;
• and
• a second communication electrode electrically coupled to the first communication electrode, wherein the target coupling flange is fixedly coupled to the second communication electrode and disposed between the first communication electrode and the second communication electrode, wherein the first communication electrode is supported such that it may be moved towards and/or away from the second communication electrode;
• a base frame;
• a rotary bearing supported by the base frame, and a second linear bearing component rotatably supported by the rotary bearing and configured to mate with the first linear bearing component of the magnetron-target coupling to form a linear bearing such that the magnetron-target coupling is provided a degree of translational freedom along an axis of rotation of the rotary bearing;
• and
• a third communication electrode arranged to face the first communication electrode of the magnetron-target coupling when the linear bearing is formed, the third communication electrode being fixedly coupled to the base frame.

A bearing device comprising:

• a base frame;
• a magnetron-target coupling comprising:
• a target coupling flange for coupling a tubular target;
• a shaft that is fixedly coupled to the target coupling flange and has a first linear bearing component at an end portion distal from the target coupling flange;
• a rotary bearing supported by the base frame, and a second linear bearing component rotatably supported by the rotary bearing and configured to mate with the first linear bearing component of the magnetron-target coupling to form a linear bearing such that the magnetron-target coupling is provided a degree of translational freedom along an axis of rotation of the rotary bearing;
• and
• a communication interface comprising:
• a first communication electrode disposed between the first linear bearing component and the target coupling flange;
• and
• a second communication electrode electrically coupled to the first communication electrode, wherein the target coupling flange is fixedly coupled to the second communication electrode and disposed between the first communication electrode and the second communication electrode, wherein the first communication electrode is supported such that it may be moved towards and/or away from the second communication electrode;
• and
• an additional communication electrode arranged to face and be spaced from the first communication electrode of the magnetron-target coupling when the linear bearing is formed, wherein the first communication electrode or the additional communication electrode are supported such that a change in a separation distance when the magnetron-target coupling is moved by a segment relative to the base frame according to the translational degree of freedom is smaller than the segment.