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US 12,394,591 B2Granted
Charged particle beam apparatus
AssigneeJEOL Ltd.
InventorsTakeshi Otsuka, Sadahiko Mochizuki
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Abstract
Light which is radiant energy is emitted from a sample which is heated, and is detected by a backscattered electron detector. A detection signal from the backscattered electron detector includes a radiant component. A radiant component removal section extracts the radiant component from the detection signal using a filter, and then removes the radiant component from the detection signal. An optical detector which detects the radiant component may be provided. A divided detector may be provided as the backscattered electron detector.
Claims11
A charged particle beam apparatus comprising:
- equipment that illuminates a sample with a charged particle beam;
- a detector that detects a particle of interest emitted from the sample, caused by illumination of the charged particle beam, and that outputs a detection signal comprising a radiant component caused by detection of radiant energy emitted from a heated subject, caused by heating of the sample;
- an identifier that identifies the radiant component through a processing of the detection signal or through selective detection of the radiant energy;
- a remover that removes the radiant component from the detection signal;
- and
- a generator that generates an image representing the sample based on a detection signal from which the radiant component is removed.
3 more elements
Dependencies are inferred from the claim text.