Method of generating a crystalline orientation map of a surface portion of a sample and computer program product

Abstract

A method generates a crystalline orientation map of a surface portion of a sample. A crystalline orientation map represents crystalline orientations at a plurality of sample locations of the surface portion. The method comprises recording an image of the surface portion including a central location using particles of a charged particle beam directed to the surface portion and backscattering from the surface portion for each of a plurality of different orientation settings. Each of the orientation settings is defined by an azimuthal angle and an elevation angle under which the charged particle beam is incident onto the central location during the recording of the respective image. The method also includes generating the crystalline orientation map based on the recorded images.

Dependencies are inferred from the claim text.