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AssigneeASML Netherlands B.V.
InventorsJanneke Ravensbergen, Patrick Sebastian Uebel, Willem Richard Pongers
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A broadband radiation source device configured for generating a broadband output radiation upon receiving pump radiation, the device including: a hollow-core photonic crystal fiber (HC-PCF) including at least one structurally varied portion having at least one structural parameter of the HC-PCF varied with respect to one or more main portions of the HC-PCF, wherein the at least one structurally varied portion includes at least a structurally varied portion located downstream of a position along the length of the HC-PCF where the pump radiation will be spectrally expanded by a modulation instability dominated nonlinear optical process, and wherein the at least one structurally varied portion is configured and located such that the broadband output radiation includes wavelengths in the ultraviolet region.
A broadband radiation source device comprising a hollow-core photonic crystal fiber (HC-PCF) to generate broadband output radiation upon receipt of pump radiation therein, the HC-PCF comprising at least one structurally varied portion, wherein the at least one structurally varied portion is configured to have radiation pass therethrough and has at least one structural parameter of the HC-PCF varied with respect to one or more main portions of the HC-PCF so as to narrow or widen a hollow core region through which radiation passes.
A broadband radiation source device comprising a hollow-core photonic crystal fiber (HC-PCF) to generate broadband output radiation upon receipt of pump radiation therein, the HC-PCF comprising at least one structurally varied portion, wherein the at least one structurally varied portion is configured to have radiation pass therethrough and has at least one structural parameter of the HC-PCF varied so as to narrow or widen a hollow core region through which radiation passes so that the hollow core has a taper with a taper gradient selected from the range of 0.01 μm/cm and 10 μm/cm.
A broadband radiation source device comprising a hollow-core photonic crystal fiber (HC-PCF) to generate broadband output radiation upon receipt of pump radiation therein, the HC-PCF comprising a first structurally varied portion, a second structurally varied portion and a third structurally varied portions, wherein each of the first, second and third structurally varied portions is configured to have radiation pass therethrough and each has at least one structural parameter of the HC-PCF varied so as to narrow or widen a hollow core region through which radiation passes.
Dependencies are inferred from the claim text.